Influence of thickness on heat treatment from 300 to 1100 K of aluminum thin film

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Anggara Budi Susila, Erfan Handoko, Esmar Budi, Agus Setyo Budi

2022 Journal of Physics: Conference Series Vol. 2193 Issue 1 Conference paper Cited by 0 SDG 7 Quartile

Abstract

We investigated the influence of Aluminum thin film thickness during heat treatment. The films with thickness of 5 nm, 10 nm and 15 nm were heated from room temperature up to above melting point with same heating rate. Molecular Dynamics (MD) simulation is employed to study the behaviour of the thin film where the atoms were followed based on its trajectories. Thin film thickness gives significance contribution to the mechanism of the melting. Smaller thickness suffered strong pressure oscillation while the thin film temperature is increases. Local crystal structure confirmed the transformation of the system from crystalline state to melting state. © Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence

Affiliations

Department of Physics, State University of Jakarta, Timur, Jalan Rawamangun Muka, Jakarta, 13220, Indonesia

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